The PDS1020-G2 Reticle Mask Inspection System provides a low cost solution to Mask Inspection. The PDS1020-G2 return on investment is < 1 year, it requires no PM schedule, and has a reduced footprint 30" Cube. The PDS1020-G2 has an installed base of over 50 units as of 6/2016. Several units have run three years plus with no servicing and no calibration requirements! No laser is used so there is no consumable illumination source. The PDS1020-G2 has been integrated into stockers, cleaners and used as a bench top unit. This unit has been adapted to most major brands of handlers. The PDS1020-G2 can also be modified to inspect other substrates.
The PDS1047 is an available option.