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KLA-Tencor Tool Support since 1986

Wafer Inspection Services, Inc. offers the following services and products:

  • Lasers; Argon, Solid State

  • KLA-Tencor / Thermawave / Prometrix

  • New surface scanners 0.15um; stand alone or integrated

  • New surface scanner technology licensing / system leasing

  • KLA-Tencor / Thermawave / Prometrix

  • On-site Full-Time Support

  • Equipment Refurbishment, 

  • Billable Support, 

  • Remote Technical Support

  • System Audits

  • Installations

  • De-Installations

  • Qualifications

  • Acceptance

  • Spare Parts

  • Consumables

 

Wafer Inspection Services, Inc. supports KLA-Tencor Legacy Tools.

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Innovative

Technology Solutions

Wafer scanning services available.

SP2:

Particle detection / bare Si from 37nm 

200mm / 300mm wafers 

SDM-100:

Particle detection / bare from Si 115nm

100mm to 200mm wafers

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New Wafer Scanners
0.15um Particle Detection

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