KLA Lasers; 6420; 6220; 6400; 6200; AIT-I; AIT-II; SP1-Classic; TBi; DLS
30mW and 75mW with alignmnet rings
Established in 1986, WIS™ Inc., specializes in support and maintenance of KLA-Tencor Legacy tools.
OTHER WIS™ SERVICES AND PRODUCTS
We now manufacture our own Reticle and Wafer Inspection Systems and have intiated final testing for NEW Wafer Scanners available from WIS, Inc.
Our wafer scanners detect sub micron particles on Bare Si, as well as Scratches, Pits and other surface anomalies.