Reticle Inspection

WIS, Inc. model number PDS 1020-G2​​              Simultaneous Dual Sided Glass/Pellicle Inspection

Particle detection user selectable  to 1 Micron 

Integrate into stockers

Set up as Go No Go operation 

Inspection time average 30 seconds for both sides

Use as a stand alone Table Top Manual Loading OR add Automation

Image Review software optional

Small footprint 38cm x 33cm x 69cm

MTBF 10+ Years

No PMs required