WIS, Inc. model number PDS 1020-G2 Simultaneous Dual Sided Glass/Pellicle Inspection
KLA Lasers; 6420; 6220; 6400; 6200; AIT-I; AIT-II; SP1-Classic; TBi; DLS
30mW and 75mW with alignmnet rings
KLA Lasers; 6420; 6220; 6400; 6200; AIT-I; AIT-II; SP1-Classic; TBi; DLS
30mW and 75mW with alignmnet rings