Welcome To Wafer Inspection Services, Inc.
Available Items
SDM-100
Surface Defect Monitoring (SDM) System
XY Scan, Bare Silicon Surface Inspection, manual load/unload system
Wafer Size: 100mm, 125mm, 150mm and 200mm
Sensitivity: 0.15um (PSL equivalent)
Size Channels: 0.15um, 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+
Repeatability: < 5% variability of mean
Utilities: 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment
Size/Weight: 30” X 30” X 30” @ 250lbs
2214-30-SLQTC
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New 30 MW Argon Laser with Alignment Rings
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Mounted/Aligned
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Used on KLA-Tencor
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Model Numbers:
6000
6200
6220
6420
SP1
NIST Calibration Wafers
Using an MSP 2300G3 Particle D
Deposition System sets the standard for wafer inspection and metrology equipment.
Increases yield for leading-edge devices.
Certified Wafer and Reticle Contamination Standards available for calibrating and
monitoring inspection systems.
Reliable particle size standards for calibrating
surface scanning equipment or particle
counters.
MSP covers all your particle and calibration
needs with advanced technology.
Measured on a KLA-Tencor SP2
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