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KLA Lasers; 6420; 6220; 6400; 6200; AIT-I;  AIT-II; SP1-Classic; TBi; DLS

30mW and 75mW with alignmnet rings


02-06-2020  Refurbished 6420 for sale In clean room available for inspection

Exclusive Lumentum KLA+ /   Lasers         WIS, Inc. Exclusive Part# 2214-30-SLWIS

Lasers used on Several KLA+ Systems ; AIT; AIT-2; AIT XP; UV; SP1-DLS……………..

75mW Lasers with alignmnet rings

30mW Lasers with alignment rings

New or Retubed

Laser installation

Laser power supply repairs                                     

Surface  Scanner available for system integration​​​​

Applications: Wafers / Reticles

Table Top Manual Load ; automated; OR integrated into Stockers

  • Factory backed warranty
  • Rings included, mounted, and aligned
  • Exclusive Lumentum / WIS, Inc. P/N 2214-30-SLWIS
  •  30mW laser w/rings mounted and aligned
  • Used on SP1-Classic and Tbi
  • Surfscan 6420; 6620; 6400; 6200
  • Other available Lasers:
  • 75mW for AIT2; XP; XUV; SP1-DLS;
  • Manufacturers Warranty 
  • Laser Installation 
  • Retubed lasers available
  • Optional retubing program, lower cost
  • PMTs for OEM AIT and SP1 systems
  • SP1 Cal Pins
  • SP1/SP2 optics and engineering support available
  • NIST Traceable Calibration Wafers

Wafer & Reticle Mask Inspection Systems                                                PDS 1020-G2

Simultaneous Dual Sided Inspection                                                                       

Integrated to  Stockers / Handlers

Wafers / Reticles

The WIS, Inc. Model #          PDS 1020G2

The PDS 1020 Inspects the surface of the Glass side and the pellicle surface of the chrome side for defects to 01 Micron (ESD)

Image Analysis Software will identify and catergorize Particles, Scratches, Dimples, Cracks and other Surface Anomalies.

Simple Go No Go automated operation

Client selectable parameters

Cost – Effectiveness

No Maintenance

High Speed

High Return On Investment

Low Capital Investment

Low Cost of Ownership

Reticle Stockers

Stand Alone Unit / Manual Handling

Wafer Steppers

Wafer Sorters / Stockers

Reticle Stockers                                                                                                                                    

Yield Enhancement

Cost Reduction

Small Footprint : Approx.: 30″ CUBE

120/240 VAC      50/60 Hz   200W

Weight:                77 Pounds

Class 1 compatible

The PDS1020-G2 Reticle Mask Inspection System provides a low cost solution to Mask Inspection

MTBF 10+ Years

This base unit has been adapted to most major brands of handlers.                                                                                 

The PDS1020-G2 can also be modified to inspect other substrates.



  • 1 Micron Detection
  • Simultaneous Dual Sided Inspection – Pellicle and Glass
  • Throughput 20 Seconds
  • Adaptable for System Integrators
  • Adaptable for Other Substrates
  • Small Footprint /Table Top
  • 16.2″ x 13″ x 16.45″
  • No PMs Required
  • Customer Option – Imaging Resolution = 0.8um
  • Review Cycle Time per Defect (Typical) = 1.5 sec
  • Object Plane Pixel Size = 0.2um
  • Object Plane FOV Horizontal = 0.62mm
  • Object Plane FOV Vertical = 0.47mm
  • Number of Review Cameras = 2
  • Camera Pixel Size = 2.2um
  • Object Plane MTF = 0.3 @IFOV
  • Magnification = 9.17
  • Review Camera Format = 2592 x 1944 Color
  • Horizontal = 2592 pixels
  • Vertical = 1944 pixels

Wafer Inspection:


Wafer Scanners are Competitive to the KLA-Tencor 6000 series tools

The 30″ cube shown above will accomodate up to 200mm wafers

300mm system available slightly larger footprint

PSL Standard Calibration Wafers

The PSL Contamination Standard is a bare silicon wafer that has microscopic latex spheres deposited on its surface. PSL Contamination Standards (PSLCS), are produced for particle size calibration of instruments that detect particles on the substrate’s surface. The polystyrene latex (PSL) spheres that are deposited on the PSL Contamination Standard are highly spherical, have well characterized reproducible optical properties, and a tight, monodisperse size distribution. These parameters make PSL spheres a Metrology Equipment QA accepted Standard for the calibration and monitoring of particle counting instruments and wafer inspection tools.

WIS™ Inc. supplies these PSL standards in a wide variety of NIST traceable and non-traceable sphere sizes-typically between 0.010 μm and 1000.0 μm. Ask WIS™ about SiC silicon carbide wafers.

Nist Wafer Inspection PSL Calibration Standards:

Standards .155 to 4.99 Price < .155 Price
NIST Traceable Standards 4-6″ CALL 4-6″ CALL
Coverage: Half | Full | Spot Deposition 8″ CALL 8″ CALL
Coverage: Half | Full | Spot Deposition 12″ CALL 12″ CALL








Non NIST Standards available using the identical process with no Certificate. If you are unsure about what calibration set to order for your equipment, please contact us with your system model number and wafer size and we’ll be pleased to reply with the manufacturers’ recommended NIST Calibration wafer set. PSL, Thin Film, White Ceramic, DSW, Custom. Our NIST PSL calibration standards are manufactured using the same deposition system used at VLSI Standards. Our thin film NIST calibration standards are the best available.

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