75mW Lasers with alignmnet rings
30mW Lasers with alignment rings
Laser power supply repairs
Surface Scanner available for system integration
Applications: Wafers / Reticles
Table Top Manual Load ; automated; OR integrated into Stockers
Integrated to Stockers / Handlers
Wafers / Reticles
The PDS 1020 Inspects the surface of the Glass side and the pellicle surface of the chrome side for defects to 01 Micron (ESD)
Image Analysis Software will identify and catergorize Particles, Scratches, Dimples, Cracks and other Surface Anomalies.
Simple Go No Go automated operation
Client selectable parameters
Cost – Effectiveness
High Return On Investment
Low Capital Investment
Low Cost of Ownership
Stand Alone Unit / Manual Handling
Wafer Sorters / Stockers
Reticle Stockers Sales@wis-inc.net
Small Footprint : Approx.: 30″ CUBE
120/240 VAC 50/60 Hz 200W
Weight: 77 Pounds
Class 1 compatible
The PDS1020-G2 Reticle Mask Inspection System provides a low cost solution to Mask Inspection
MTBF 10+ Years
The PDS1020-G2 can also be modified to inspect other substrates.
MASK DEFECT REVIEW SPECIFICATIONS:
Wafer Scanners are Competitive to the KLA-Tencor 6000 series tools
The 30″ cube shown above will accomodate up to 200mm wafers
300mm system available slightly larger footprint
The PSL Contamination Standard is a bare silicon wafer that has microscopic latex spheres deposited on its surface. PSL Contamination Standards (PSLCS), are produced for particle size calibration of instruments that detect particles on the substrate’s surface. The polystyrene latex (PSL) spheres that are deposited on the PSL Contamination Standard are highly spherical, have well characterized reproducible optical properties, and a tight, monodisperse size distribution. These parameters make PSL spheres a Metrology Equipment QA accepted Standard for the calibration and monitoring of particle counting instruments and wafer inspection tools.
WIS™ Inc. supplies these PSL standards in a wide variety of NIST traceable and non-traceable sphere sizes-typically between 0.010 μm and 1000.0 μm. Ask WIS™ about SiC silicon carbide wafers.
Nist Wafer Inspection PSL Calibration Standards:
|Standards||.155 to 4.99||Price||< .155||Price|
|NIST Traceable Standards||4-6″||CALL||4-6″||CALL|
|Coverage: Half | Full | Spot Deposition||8″||CALL||8″||CALL|
|Coverage: Half | Full | Spot Deposition||12″||CALL||12″||CALL|
NON NIST STANDARDS:
Non NIST Standards available using the identical process with no Certificate. If you are unsure about what calibration set to order for your equipment, please contact us with your system model number and wafer size and we’ll be pleased to reply with the manufacturers’ recommended NIST Calibration wafer set. PSL, Thin Film, White Ceramic, DSW, Custom. Our NIST PSL calibration standards are manufactured using the same deposition system used at VLSI Standards. Our thin film NIST calibration standards are the best available.