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Services

KLA-Tencor Legacy Tool Support

Lower your cost of maintaining metrology equipment and systems. Wafer Inspection Services, Inc. offers comprehensive semiconductor metrology legacy support.

OEM SYSTEMS SUPPORTED:

  • UV1250SE
  • UV1280SE
  • Aset F5X
  • Spectra FX 100
  • Spectra FX 200
  • Surfscan 6200; 6220; 6400; 6420
  • AIT Series
  • PUMA
  • SP1, SP1-TBi, SP1-DLS

METROLOGY LEGACY SUPPORT SERVICES:

  • Audits
  • Installations & Deinstallations
  • Lock down / Prep for shipment
  • Applications, Metrology, Operator & Maintenance Training
  • Preventative & Corrective Maintenance
  • Technical Support
  • Per Call Service
  • Full Time On Site Service

Training

  • Operator Training
  • Applications Training
  • Maintenance Training

Robotic Services

We offer repair and refurbishment on robots, pre-aligners and controllers with our focus on quality and speed.

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